ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
First Claim
1. An apparatus for processing a substrate, comprising:
- a chamber;
a rotor;
a bellows connected to the chamber;
a substrate support having a heater disposed within the chamber;
a first shaft supporting the substrate support at a first end and coupled to the rotor at a second end;
a second shaft coupled to the rotor; and
a seal connecting the rotor to the bellows, the seal comprising a groove in an inner wall of the seal and a seal member disposed in the groove and contacting the rotor.
1 Assignment
0 Petitions
Accused Products
Abstract
A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.
16 Citations
9 Claims
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1. An apparatus for processing a substrate, comprising:
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a chamber; a rotor; a bellows connected to the chamber; a substrate support having a heater disposed within the chamber; a first shaft supporting the substrate support at a first end and coupled to the rotor at a second end; a second shaft coupled to the rotor; and a seal connecting the rotor to the bellows, the seal comprising a groove in an inner wall of the seal and a seal member disposed in the groove and contacting the rotor. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus for processing a substrate comprising:
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a chamber; a substrate support having a heater disposed within the chamber and a first shaft coupled to the substrate support; a bellows connected to the chamber and surrounding the first shaft; a rotor connected to the first shaft; a seal connecting the support pedestal to the bellows, the seal comprising a groove in an inner wall of the seal and a seal member disposed in the groove and contacting the rotor; a motor; a second shaft connected to the rotor and the motor; and a lift mechanism connected to the motor. - View Dependent Claims (7, 8, 9)
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Specification
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- Resources
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Current AssigneeApplied Materials Incorporated
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Original AssigneeApplied Materials Incorporated
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InventorsSmith, Jacob, TRAN, BINH, MERRY, NIR, BRAILOVE, ADAM, TAM, ALEXANDER, SURYANARAYANAN IYER, R., SEUTTER, SEAN, SHYDO, ROBERT Jr., ANDREWS, ROBERT, ROBERTS, FRANK, SMICK, THEODORE, RYDING, GEOFFREY
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Application NumberUS13/559,511Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current118/725CPC Class CodesC23C 16/4584 the substrate being rotatedH01L 21/67126 Apparatus for sealing, enca...H01L 21/68742 characterised by a lifting ...H01L 21/68792 characterised by the constr...
