Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images
DC
First Claim
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1. A microscope assembly comprising:
- scanning and measurement means to;
scan an object;
make measurements of the object while the object is scanned; and
generate measurement data representing the measurements;
a pointing device;
a controller configured to;
control the scanning and measurement means in scanning and making measurements of the object;
generate first image data representing a first image associated with the object in response to the measurement data;
generate second image data representing a second image of the first image and a measuring tool projected on the first image in response to the first image data, the measuring tool including endpoint cursors that can be manipulated with the pointing device to position the measuring tool so as to select a cross section of the first image between the endpoint cursors;
generate cross section data representing cross section information about the selected cross section between the endpoint cursors of the measuring tool;
format the second image data for display of the second image; and
format the cross section data for display of the cross section information; and
a display configured to;
display the second image in response to the formatted second image data; and
display the cross section information in response to the formatted cross section data.
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Abstract
A scanning probe microscope assembly and corresponding method for making confocal, spectrophotometric, near-field, and scanning probe measurements and forming associated images from the measurements.
59 Citations
12 Claims
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1. A microscope assembly comprising:
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scanning and measurement means to;
scan an object;
make measurements of the object while the object is scanned; and
generate measurement data representing the measurements;
a pointing device;
a controller configured to;
control the scanning and measurement means in scanning and making measurements of the object;
generate first image data representing a first image associated with the object in response to the measurement data;
generate second image data representing a second image of the first image and a measuring tool projected on the first image in response to the first image data, the measuring tool including endpoint cursors that can be manipulated with the pointing device to position the measuring tool so as to select a cross section of the first image between the endpoint cursors;
generate cross section data representing cross section information about the selected cross section between the endpoint cursors of the measuring tool;
format the second image data for display of the second image; and
format the cross section data for display of the cross section information; and
a display configured to;
display the second image in response to the formatted second image data; and
display the cross section information in response to the formatted cross section data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
the first image comprises a 3D surface image; and
the measurement information includes (a) the height difference in the Z direction of surface points on the 3D surface image at the endpoint cursors of the cutting plane, and (b) the length in the X,Y plane between the surface points.
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9. A microscope assembly as claimed in claim 1 wherein:
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the cross section information includes (a) a 2D image of the selected cross section between the endpoint cursors of the cutting plane, and (b) cross section cursors that can be manipulated with the pointing device to select points of the first image along the selected cross section;
the measuring tool routine is further configured to generate cursor data representing measurement information about the selected points;
the data formatting routine is further configured to format the cursor data for display of the measurement information; and
the display is further configured to display the measurement information in response to the formatted cursor data.
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10. A microscope assembly as claimed in claim 9 wherein:
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the first image comprises a 3D surface image;
the selected points are surface points on the 3D surface image; and
the measurement information includes (a) the height difference in the Z direction of the surface points, and (b) the length in the X,Y plane between the surface points.
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11. A microscope assembly as claimed in claim 10 wherein the measurement information further includes (c) the angle between the surface points.
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12. A microscope assembly as claimed in claim 1 wherein the endpoint cursors magnify the first image therearound to enable accurate positioning of the endpoint cursors.
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Litigation Data
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Current AssigneeTerraspan LLC
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Original AssigneeGeneral Nanotechnology LLC
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InventorsKley, Vic B.
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Primary Examiner(s)Lee, John R.
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Application NumberUS09/249,567Time in Patent Office931 DaysField of Search250/234, 250/235, 250/236, 250/306, 250/307, 250/310, 250/311, 356/373, 356/375, 356/376, 382/128, 382/129, 382/130, 382/154, 382/254, 382/286, 382/287US Class Current250/234CPC Class CodesG01Q 30/02 Non-SPM analysing devices, ...G01Q 60/02 Multiple-type SPM, i.e. inv...G01Q 60/16 Probes, their manufacture, ...G01Q 60/22 Probes, their manufacture, ...G02B 21/002 Scanning microscopes scanni...G03F 1/84 InspectingG03F 7/704 Scanned exposure beam, e.g....G03F 7/70616 Monitoring the printed patt...G11B 5/232 Manufacture of gapG11B 5/3116 Shaping of layers, poles or...Y10S 977/85 Scanning probe control processY10S 977/852 for detection of specific n...
