Method for compensating the position offset of a capacitive inertial sensor, and capacitive inertial sensor
DCFirst Claim
Patent Images
1. An inertial sensor made of semiconductor material, comprising a stator element and a rotor element electrostatically coupled together;
- and an actuator made of semiconductor material, coupled to said rotor element and controlled so as to compensate a position offset of the rotor element.
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Abstract
An inertial sensor having a stator and a rotor made of semiconductor material and electrostatically coupled together, and a microactuator also made of semiconductor material, coupled to the rotor and controlled so as to move the rotor itself and thus compensate for the position offset thereof.
20 Citations
25 Claims
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1. An inertial sensor made of semiconductor material, comprising a stator element and a rotor element electrostatically coupled together;
- and an actuator made of semiconductor material, coupled to said rotor element and controlled so as to compensate a position offset of the rotor element.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for compensating the position offset of an inertial sensor made of semiconductor material and having a stator element and a rotor element electrostatically coupled together;
- comprising moving said rotor element to compensate for a positon offset thereof.
- View Dependent Claims (14, 15, 16, 17, 18)
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19. An inertial sensor, comprising:
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a sensor element, comprising;
a stator;
a rotor; and
an actuator formed on the sensor element, the actuator comprising a fixed arm connected to one of the stator and the rotor and a mobile arm connected to the other of the stator and the rotor, the actuator configured to adjust positions of the stator and the rotor relative to one another in response to a driving signal. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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Specification