Reverse optical mastering for data storage disks
First Claim
1. A method of making a data storage disk master comprising:
- providing a master substrate;
specifying a photosensitive material layer thickness;
providing a layer of photosensitive material on the master substrate, the layer having an initial thickness corresponding to the specified photosensitive material layer thickness;
controlling optical exposure to the layer of photosensitive material; and
controlling development criteria of the layer of photosensitive material, wherein specifying a photosensitive material layer thickness, controlling optical exposure and controlling development criteria collectively control the creation of an inverse of a desired replica disk pattern on the master.
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Accused Products
Abstract
A data storage master disk and method of making a data storage master disk. The data storage disk master is for use in a data storage disk replication process. The data storage disk molding processes produces replica disks having a surface relief pattern with replica lands and replica grooves. The method includes providing a master substrate. The master substrate is at least partially covered with a layer of photosensitive material. A surface relief pattern having master lands and master grooves is recorded in the data storage disk master, including the steps of exposing and developing the photosensitive material. The exposing and developing of a specified thickness of photosensitive material is controlled to form master grooves extending down to a substrate interface between the master substrate and the layer of photosensitive material, such that the width of the master grooves at the substrate interface corresponds to a desired width of the replica lands.
21 Citations
26 Claims
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1. A method of making a data storage disk master comprising:
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providing a master substrate;
specifying a photosensitive material layer thickness;
providing a layer of photosensitive material on the master substrate, the layer having an initial thickness corresponding to the specified photosensitive material layer thickness;
controlling optical exposure to the layer of photosensitive material; and
controlling development criteria of the layer of photosensitive material, wherein specifying a photosensitive material layer thickness, controlling optical exposure and controlling development criteria collectively control the creation of an inverse of a desired replica disk pattern on the master. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of making a data storage disk master comprising:
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providing a master substrate;
specifying a thickness of photosensitive material;
coating the master substrate with the specified thickness of photosensitive material;
exposing the photosensitive material to a controlled amount of optical energy; and
exposing the photosensitive material to developer solution, wherein the specified thickness of photosensitive material, the controlled amount of optical energy, and the exposure to developer solution collectively define an inverse pattern of specified lands and grooves on the master. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A method of making a data storage disk master comprising:
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providing a master substrate;
specifying a thickness of photosensitive material;
coating the master substrate with the specified thickness of photosensitive material;
exposing the photosensitive material to a controlled amount of optical energy; and
exposing the photosensitive material to developer solution, wherein the specified amount of photosensitive material, the controlled amount of optical energy, and exposure to the developer solution collectively define a pattern having an inverse of desired surface variations. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification