Solid-state imaging device
DCFirst Claim
1. A solid-state imaging device, comprising:
- a plurality of photodiodes configured to perform optical-electrical conversion, each of the photodiodes being two-dimensionally arranged in row and column directions on a semiconductor substrate;
a plurality of transfer gates configured to transfer a signal electric charge obtained from performing the optical-electrical conversion, each of the transfer gates being provided on the semiconductor substrate for a corresponding one of the photodiodes;
a plurality of floating diffusion layers configured to temporarily store the transferred signal electric charge, each of the floating diffusion layers being provided for at least one of the corresponding photodiodes and at least one of the corresponding transfer gates;
an amplifier transistor configured to amplify the signal electric charge supplied to a gate thereof;
the amplifier transistor being provided on the semiconductor substrate;
a reset transistor configured to reset the signal electric charge stored in the floating diffusion layer, the reset transistor being provided on the semiconductor substrate;
a vertical signal line configured to output a signal corresponding to the signal electric charge in the floating diffusion layer,a signal line connecting a floating diffusion layer with a gate of an amplifier transistor, the signal line including a portion disposed in a column direction;
a first contact configured to receive an output of a source of the amplifier transistor;
a second contact connected to a drain of the reset transistor; and
a third contact connected to a source of the reset transistor,wherein a gate of the amplifier transistor is connected, in the column direction, to at least one of the plurality of floating diffusion layers,the gate of the amplifier transistor and the floating diffusion layer connected thereto are formed in different active regions respectively, andthe first, second, and third contacts are aligned in a straight line.
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Accused Products
Abstract
In each photosensitive cell, a photodiode 101, a transfer gate 102, a floating diffusion layer section 103, an amplifier transistor 104, and a reset transistor 105 are formed in one active region surrounded by a device isolation region. The floating diffusion layer section 103 included in one photosensitive cell is connected not to the amplifier transistor 104 included in that cell but to the gate of the amplifier transistor 104 included in another photosensitive cell adjacent to the one photosensitive cell in the column direction. A polysilicon wire 111 connects the transfer gates 102 arranged in the same row, and a polysilicon wire 112 connects the reset transistors 105 arranged in the same row. For connection in the row direction, only polysilicon wires are used.
15 Citations
16 Claims
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1. A solid-state imaging device, comprising:
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a plurality of photodiodes configured to perform optical-electrical conversion, each of the photodiodes being two-dimensionally arranged in row and column directions on a semiconductor substrate; a plurality of transfer gates configured to transfer a signal electric charge obtained from performing the optical-electrical conversion, each of the transfer gates being provided on the semiconductor substrate for a corresponding one of the photodiodes; a plurality of floating diffusion layers configured to temporarily store the transferred signal electric charge, each of the floating diffusion layers being provided for at least one of the corresponding photodiodes and at least one of the corresponding transfer gates; an amplifier transistor configured to amplify the signal electric charge supplied to a gate thereof;
the amplifier transistor being provided on the semiconductor substrate;a reset transistor configured to reset the signal electric charge stored in the floating diffusion layer, the reset transistor being provided on the semiconductor substrate; a vertical signal line configured to output a signal corresponding to the signal electric charge in the floating diffusion layer, a signal line connecting a floating diffusion layer with a gate of an amplifier transistor, the signal line including a portion disposed in a column direction; a first contact configured to receive an output of a source of the amplifier transistor; a second contact connected to a drain of the reset transistor; and a third contact connected to a source of the reset transistor, wherein a gate of the amplifier transistor is connected, in the column direction, to at least one of the plurality of floating diffusion layers, the gate of the amplifier transistor and the floating diffusion layer connected thereto are formed in different active regions respectively, and the first, second, and third contacts are aligned in a straight line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A solid-state imaging device, comprising:
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a plurality of photodiodes configured to perform optical-electrical conversion, each of the photodiodes being two-dimensionally arranged in row and column directions on a semiconductor substrate; a plurality of transfer gates configured to transfer a signal electric charge obtained from performing the optical-electrical conversion, each of the transfer gates being provided on the semiconductor substrate for a corresponding one of the photodiodes; a plurality of floating diffusion layers configured to temporarily store the transferred signal electric charge, each of the floating diffusion layers being provided for at least one of the corresponding photodiodes and at least one of the corresponding transfer gates; an amplifier transistor configured to amplify the signal electric charge supplied to a gate thereof;
the amplifier transistor being provided on the semiconductor substrate;a reset transistor configured to reset the signal electric charge stored in the floating diffusion layer, the reset transistor being provided on the semiconductor substrate; a vertical signal line configured to output a signal corresponding to the signal electric charge in the floating diffusion layer; a signal line connecting a floating diffusion layer with a gate of an amplifier transistor, the signal line including a portion disposed in a column direction; a first contact configured to receive an output of a source of the amplifier transistor; a third contact connected to a source of the reset transistor; and a fourth contact configured to supply an input to a drain of the amplifier transistor, wherein a gate of the amplifier transistor is connected, in column direction, to at least one of the plurality of floating diffusion layers, the gate of the amplifier transistor and the floating diffusion layer connected thereto are formed in different active regions respectively, and the first, third, and fourth contacts are aligned in a straight line. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification